ASML EUV High-NA, when are the CPU / GPU scanners for?

As we nicely know from the variety of subjects we’ve got lined on this regard, it’s ASML that has the higher hand and the one which units the trade’s tempo. The complexity and development of its scanners is of such a caliber that by pure funding nobody considers making them actual and direct competitors in the most superior expertise.

It is true that in additional widespread scanners there’s some competitors, however in the relaxation, which is the necessary factor in semiconductors, ASML is alone and subsequently figuring out what it has ready for us is synonymous with understanding how far Intel, AMD are going to go and NVIDIA.

ASML up to date its roadmap with necessary information


The sections the place the firm goes to explode the market as soon as once more shall be divided this time into three very clear and differentiated ones: DUV methods, EUV methods and EUV High-NA methods.

Obviously, these three market choices are aimed toward various kinds of merchandise, however the fact is that in all instances the DUV market is more and more scarce and logically everyone seems to be transferring in direction of EUV in order to not actually lag behind their rivals. The drawback, as has been talked about many occasions, is that the variety of scanners could be very restricted yearly, and though ASML is growing the quantity of manufacturing there’s an open warfare to purchase extra items.

For this cause, in the three methods that we’ve got named there are novelties, which is able to mark each the applied sciences, in addition to the yields in addition to the availability of wafers in manufacturing, essential in the midst of the semiconductor disaster as we are experiencing.

DUV methods


Although it appears unusual, the actuality is that each TSMC, Samsung or Intel proceed to make use of DUV in a course of combined with EUV. As we all know, wafers and chips are created in layers, so immersion expertise remains to be wanted in sure masks.

For this cause, ASML has offered its fourth era of NXT scanners, particularly the new NXT: 2050i. The enhancements concentrate on the new wafer handler, the wafer stage, the projection lens, the laser pulse extender and the immersion hood itself.

These enhancements permit extra correct, quicker measurements and the next diploma of wafer deflection correction, leading to not solely extra practical chips being achieved, but additionally growing throughput per hour (Wph) from 275 wafers to all 295 wafers.

This if we speak about ArFi expertise (immersion), but when we speak about dry expertise (ArF) the information is concentrated on a brand new NXT: 1470 what gives 300 WpH, being a little bit quicker than its counterpart in ArFi, but it surely won’t develop into the greatest model of itself, since we are speaking a couple of second era arriving with the identical identify and a efficiency of 330 WpH.

This will keep away from to some extent that the provide is so scarce, the drawback is that in the midst of the semiconductor disaster, main corporations comparable to these talked about could accept their present scanners to be able to purchase EUV.

EUV at 0.33 NA


Or simply EUV, since we are presently at this wavelength. Intel already has scanners with this expertise and size, as clearly Samsung and naturally TSMC, the place the 7 nm + and 5 nm amongst others will come from there, in addition to the 1z RAM of the Koreans.

We have been with scanners for a 12 months and a half NXE: 3400C and now in full scarcity ASML proclaims the new NXE: 3600D, which are already in the reservation course of and shall be despatched from the finish of this 12 months if all goes nicely.


The enhancements are not clear on this regard, there’s a little bit of controversy and hypothesis as a result of the scanner arrives with some delay, but when we’ve got to cite one thing the rumored states that it’ll have extra energy, higher optics, a quicker part change and shall be tailored to the three nm system and beneath.

This can be with out counting the improve in WpH, since we went from 135 in the already veteran NXE: 3400C to 160 in the new scanner. NXE: 3600D.

EUV High-NA 0.55


The excessive wavelength for EUV was a problem not so way back and is now extra of a tangible actuality than the rest. The slide reveals this, with a WpH between 185 and 150 relying on the mj / cm2 utilized for engraving.

The information just isn’t identified, there are not even leaks concerning the way it has been potential to achieve and climb as much as 0.55 NA, however we do have an arrival date for the scanners EXE: 5000 and particularly of the new ones EXE: 5200 that may arrive in 2025 and 2026, relying on how wavelength methods evolve.

We know that the 0.33NA can file at a step of 30 nm with a single publicity, whereas work is being executed to decrease that determine to 28 nm and presumably finish of life as much as 26 nm, no less than in a number of patterns.

This may also produce the 3nm TSMC with the so-called Multi Pattern, however from there it isn’t believed that they are often lowered with out better wavelength. To such an extent the whole lot is sophisticated, that new scanners shall be wanted and the engravings with them must be instantly double-patterned, no less than for the 2 nm TSMC and 5 nm from Intel.

But equally, though the problem is larger, the efficiency may even be by scanner, since they are engaged on EUV masks with better capability and absorbent layers, additionally on enhancing photo-resistant ones, a key piece for a extra excellent engraving.

Therefore, the future doesn’t look straightforward, however no less than ASML has in thoughts and in design new scanners that may permit to go down from the 26 nm of Pitch Metal, which is able to produce nodes with smaller transistors, beneath the 2 nm and 5 nm on TSMC and Intel. The drawback on the different hand is clear: the funding is skyrocketing, the prices for extra of the identical and the time between node and node is rising, so scaling in efficiency goes to be actually tough for CPUs and GPUs.